Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381074 | Method, control system, and system for machining a semiconductor wafer, and semiconductor wafer | Axel Beyer, Stefan WELSCH | 2025-08-05 |
| 11658022 | Method, control system, and system for machining a semiconductor wafer, and semiconductor wafer | Axel Beyer, Stefan WELSCH | 2023-05-23 |
| 11158549 | Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer | Stefan WELSCH, Axel Beyer | 2021-10-26 |
| 10961638 | Method for epitaxially coating semiconductor wafers, and semiconductor wafer | Christian Hager, Katharina May | 2021-03-30 |
| 6996462 | Method of controlling at least one autonomously driving vehicle | Harro Heilmann, Rainer Konzmann, Andreas Schwarzhaupt, Gernot Spiegelberg, Armin Sulzmann | 2006-02-07 |