Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8829532 | Semiconductor layer structure comprising a cavity layer and method for fabricating the semiconductor layer structure | Brian Murphy, Maik Häberlen, Jörg Lindner | 2014-09-09 |
| 8383495 | Semiconductor layer structure and method for fabricating a semiconductor layer structure | Brian Murphy, Maik Haeberlen, Joerg Lindner | 2013-02-26 |
| 7396408 | Monocrystalline diamond layer and method for the production thereof | Matthias Schreck, Stefan Gsell | 2008-07-08 |
| 7294564 | Method for forming a layered semiconductor technology structure and corresponding layered semiconductor technology structure | Wilfried Attenberger, Jörg Lindner | 2007-11-13 |
| 5084300 | Apparatus for the ablation of material from a target and coating method and apparatus | Willi Zander, Joachim Frohlingsdorf | 1992-01-28 |