Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226873 | System and method for processing silicon wafers | Tom Wu, Katharina Zahnweh | 2025-02-18 |
| 7763095 | Internal gettering by metal alloy clusters | Anthony Buonassisi, Matthias Heuer, Matthew D. Pickett, Mathew A. Marcus, Eicke R. Weber | 2010-07-27 |