Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152228 | Wafer cleaning apparatus and cleaning method using the same | — | 2021-10-19 |
| 8821219 | Wafer unloading system and wafer processing equipment including the same | Jin Woo Ahn, Eun-Suck Choi, Bong-Woo Kim, Hwan-Su Yu | 2014-09-02 |