Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385794 | Systems and methods for continuous mode force testing | Allan Liu, Dan Benjamin | 2025-08-12 |
| 11946817 | Integrated digital force sensors and related methods of manufacture | Ali Foughi, Ryan Diestelhorst, Dan Benjamin, Julius Minglin Tsai | 2024-04-02 |
| 11874183 | Systems and methods for continuous mode force testing | Allan Liu, Dan Benjamin | 2024-01-16 |
| 11255737 | Integrated digital force sensors and related methods of manufacture | Ali Foughi, Ryan Diestelhorst, Dan Benjamin, Julius Minglin Tsai | 2022-02-22 |
| 10491159 | Self-tuning microelectromechanical impedance matching circuits and methods of fabrication | — | 2019-11-26 |
| 10388462 | Tunable reactance devices, and methods of making and using the same | — | 2019-08-20 |
| 9878902 | Cavity pressure modification using local heating with a laser | Martin Lim | 2018-01-30 |
| 9593008 | MEMS sensor including an over-travel stop and method of manufacture | Matthew Julian Thompson, Ilya Gurin, Joseph Seeger | 2017-03-14 |
| 9556019 | Cavity pressure modification using local heating with a laser | Martin Lim | 2017-01-31 |
| 7529017 | Circuit and method for snapdown prevention in voltage controlled MEMS devices | Andrew J. Walker, Marc D. Hartranft | 2009-05-05 |
| 7502157 | Multi-layer spatial light modulator for amplitude and phase control | — | 2009-03-10 |
| 7405389 | Dense multi-axis array for motion sensing | Douglas A. Webb | 2008-07-29 |
| 7202988 | Diffractive light modulator | Alexander Payne, Wilhelmus A. de Groot, David T. Amm, Omar S. Leung, James Hunter +2 more | 2007-04-10 |
| 6922273 | PDL mitigation structure for diffractive MEMS and gratings | Dinesh Maheshwari | 2005-07-26 |
| 6806997 | Patterned diffractive light modulator ribbon for PDL reduction | Dinesh Maheshwari, Christopher Gudernan, Jahja I. Trisnadi | 2004-10-19 |
| 6630643 | Method and structure for forming metallic interconnections using directed thermal diffusion | — | 2003-10-07 |
| 6465732 | Laser formation of a metal capacitor and integrated coaxial line | — | 2002-10-15 |