Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9904170 | Reticle transmittance measurement method, projection exposure method using the same, and projection exposure device | Michihiro Murata | 2018-02-27 |
| 9733567 | Reticle transmittance measurement method, and projection exposure method using the same | Michihiro Murata | 2017-08-15 |