Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8887568 | Micromechanical system and method for building a micromechanical system | Dirk Scheibner, Alexey Shaporin | 2014-11-18 |
| 8887571 | Vibrating micromechanical system having beam-shaped element | Marco Dienel, Dirk Scheibner | 2014-11-18 |