Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5280189 | Semiconductor element with a silicon layer | Armin Splett, Joachim Schmidtchen, Klaus Petermann | 1994-01-18 |
| 5252514 | Process for producing a low-loss optical waveguide in an epitaxial silicon film | — | 1993-10-12 |