| 11927555 |
Micromachined thermal time-of-flight fluidic concentration metering device |
Liji Huang, Li Chen, Chih-Chang Chen |
2024-03-12 |
| 10908006 |
Method for forming micromachined liquid flow sensor |
Chih-Chang Chen, Liji Huang |
2021-02-02 |
| 8794082 |
MEMS time-of-flight thermal mass flow meter |
Liji Huang, XiaoZhong Wu, Chih-Chang Chen |
2014-08-05 |
| 8132455 |
Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane |
Chih-Chang Chen, Gaofeng Wang, Liji Huang |
2012-03-13 |
| 7908096 |
Integrated micromachined thermal mass flow sensor and methods of making the same |
Gaofeng Wang, Chih-Chang Chen, Liji Huang |
2011-03-15 |
| 7878056 |
Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same |
Liji Huang, Chih-Chang Chen, Gaofeng Wang |
2011-02-01 |
| 7780343 |
Micromachined gas and liquid concentration sensor and method of making the same |
Chih-Chang Chen, Gaofeng Wang, Liji Huang |
2010-08-24 |
| 7765679 |
Method of manufacturing a flow rate sensor |
Chih-Chang Chen, Gafeng Wang, Liji Huang |
2010-08-03 |
| 7752910 |
Micromachined mass flow sensor and methods of making the same |
Gaofeng Wang, Chih-Chang Chen, Liji Huang |
2010-07-13 |
| 7536908 |
Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods |
Gaofeng Wang, Chih-Chang Chen, Liji Huang |
2009-05-26 |
| 6781735 |
Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
Liji Huang, Naiqian Han, Gaofeng Wang |
2004-08-24 |
| 6620712 |
Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications |
Liji Huang, Naiqian Han, Gaofeng Wang |
2003-09-16 |