Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927555 | Micromachined thermal time-of-flight fluidic concentration metering device | Liji Huang, Li Chen, Chih-Chang Chen | 2024-03-12 |
| 10908006 | Method for forming micromachined liquid flow sensor | Chih-Chang Chen, Liji Huang | 2021-02-02 |
| 8794082 | MEMS time-of-flight thermal mass flow meter | Liji Huang, XiaoZhong Wu, Chih-Chang Chen | 2014-08-05 |
| 8132455 | Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane | Chih-Chang Chen, Gaofeng Wang, Liji Huang | 2012-03-13 |
| 7908096 | Integrated micromachined thermal mass flow sensor and methods of making the same | Gaofeng Wang, Chih-Chang Chen, Liji Huang | 2011-03-15 |
| 7878056 | Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same | Liji Huang, Chih-Chang Chen, Gaofeng Wang | 2011-02-01 |
| 7780343 | Micromachined gas and liquid concentration sensor and method of making the same | Chih-Chang Chen, Gaofeng Wang, Liji Huang | 2010-08-24 |
| 7765679 | Method of manufacturing a flow rate sensor | Chih-Chang Chen, Gafeng Wang, Liji Huang | 2010-08-03 |
| 7752910 | Micromachined mass flow sensor and methods of making the same | Gaofeng Wang, Chih-Chang Chen, Liji Huang | 2010-07-13 |
| 7536908 | Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods | Gaofeng Wang, Chih-Chang Chen, Liji Huang | 2009-05-26 |
| 6781735 | Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate | Liji Huang, Naiqian Han, Gaofeng Wang | 2004-08-24 |
| 6620712 | Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications | Liji Huang, Naiqian Han, Gaofeng Wang | 2003-09-16 |