Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12221595 | Decomposing/cleaning composition, method for cleaning adhesive polymer, and method for producing device wafer | Susumu Nakazaki, Kuniaki Miyahara | 2025-02-11 |
| 11807837 | Composition, method for cleaning adhesive polymer, method for producing device wafer, and method for regenerating support wafer | Susumu Nakazaki, Kuniaki Miyahara | 2023-11-07 |
| 11164751 | Etching method | — | 2021-11-02 |
| 7572428 | Process for producing fluorine gas | Masakazu Oka, Junichi Torisu | 2009-08-11 |
| 7524480 | Process for producing manganese fluoride | Masakazu Oka, Naoki Asaga | 2009-04-28 |