Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8608918 | Magnet structure and cathode electrode unit for magnetron sputtering, and magnetron sputtering system | Takahiko Kondo, Takanobu Hori, Yasukuni Iwasaki | 2013-12-17 |