Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215052 | Silica glass disc having dimples formed thereon | Akiyoshi Tsuchida, Norikazu Fujii | 2025-02-04 |
| RE41249 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof | Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Tomoyuki Shirai | 2010-04-20 |
| 7645526 | Member for plasma etching device and method for manufacture thereof | Itsuo Araki | 2010-01-12 |
| 6887576 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof | Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Tomoyuki Shirai | 2005-05-03 |
| 6869898 | Quartz glass jig for processing apparatus using plasma | Naoto Watanabe, Tohru Segawa, Hiroyuki Kimura | 2005-03-22 |
| 6723386 | Fluororesin-coated quartz glass jig and method for producing the same | Itsuo Araki | 2004-04-20 |
| 6680455 | Plasma resistant quartz glass jig | Naoki Hayashi, Tohru Segawa | 2004-01-20 |
| 6514582 | Quartz glass member for use in dry etching and dry etching system equipped with the same | — | 2003-02-04 |
| 6458445 | Quartz glass jig having large irregularities on the surface and method for producing the same | — | 2002-10-01 |
| 5977000 | High purity opaque silica glass | Tatsuhiro Sato, Akira Fujinoki, Nobumasa Yoshida, Tohru Yokota | 1999-11-02 |
| 5876473 | Method of producing cristobalite containing silica glass | Tohru Segawa, Nobumasa Yoshida, Mamoru Endo | 1999-03-02 |
| 5772714 | Process for producing opaque silica glass | Tatsuhiro Sato, Akira Fujinoki, Nobumasa Yoshida, Tohru Yokota | 1998-06-30 |
| 5523266 | Optical member of synthetic quartz glass for excimer lasers and method for producing same | Hiroyuki Nishimura, Akira Fujinoki, Toshikatsu Matsuya, Toshiyuki Kato, Atsushi Shimada | 1996-06-04 |
| 5410428 | Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof | Shigeru Yamagata, Michiyou Kuriyama, Ralf Takke | 1995-04-25 |
| 5364433 | Optical member of synthetic quartz glass for excimer lasers and method for producing same | Hiroyuki Nishimura, Akira Fujinoki, Toshikatsu Matsuya, Toshiyuki Kato, Atsushi Shimada | 1994-11-15 |
| 5325230 | Optical members and blanks of synthetic silica glass and method for their production | Shigeru Yamagata, Toshikatu Matsuya, Ralf Takke, Stephan Thomas, Heinz Fabian | 1994-06-28 |
| 5086352 | Optical members and blanks or synthetic silica glass and method for their production | Shigeru Yamagata, Toshikatu Matsuya, Ralf Takke, Stephan Thomas, Heinz Fabian | 1992-02-04 |