Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588638 | Single crystal pulling apparatus | — | 2009-09-15 |
| 6153009 | Method for producing a silicon single crystal and the silicon single crystal produced thereby | Toshiharu Uesugi, Izumi Fusegawa, Tomohiko Ohta, Tetsuya Igarashi, Tetsuhiro Oda | 2000-11-28 |
| 5131974 | Method of controlling oxygen concentration in single crystal and an apparatus therefor | Tetsuhiro Oda, Susumu Sonokawa, Atsushi Ozaki | 1992-07-21 |