Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11325220 | Double-side polishing method and double-side polishing apparatus | Yuki Tanaka | 2022-05-10 |
| 10395933 | Method for manufacturing semiconductor wafer | Yoshihiro Usami | 2019-08-27 |
| 10147656 | Sizing device, polishing apparatus, and polishing method | Shigeru Oba | 2018-12-04 |