Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731236 | Method for selecting template assembly, method for polishing workpiece, and template assembly | Kazuya Sato, Hiromasa Hashimoto | 2023-08-22 |
| 10913137 | Method for polishing silicon wafer | Yuki Tanaka | 2021-02-09 |
| 10744615 | Method for polishing wafer and polishing apparatus | Kazuya Sato, Hiromasa Hashimoto | 2020-08-18 |