Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272542 | Apparatus for cleaning semiconductor silicon wafer and method for cleaning semiconductor silicon wafer | — | 2025-04-08 |
| 11878329 | Method for cleaning silicon wafer | Tatsuo Abe | 2024-01-23 |
| 11862456 | Method for cleaning semiconductor wafer | — | 2024-01-02 |
| 11222780 | Method for evaluating silicon wafer and method for manufacturing silicon wafer | Tatsuo Abe | 2022-01-11 |
| 11177125 | Method for cleaning semiconductor wafer | Tatsuo Abe | 2021-11-16 |
| 11094525 | Method for cleaning semiconductor wafer | Tatsuo Abe | 2021-08-17 |