Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6467626 | Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container | — | 2002-10-22 |
| 5918587 | Method of producing slices | Fumihiko Hasegawa, Toshihiro Tsuchiya | 1999-07-06 |
| 5620357 | Polishing method and apparatus for automatic reduction of wafer taper in single-wafer polishing | Kouichi Tanaka, Morifumi Matsumoto, Kouji Morita | 1997-04-15 |