Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5209996 | Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same | Meguru Kashida, Yoshihiro Kubota | 1993-05-11 |
| 5199055 | X-ray lithographic mask blank with reinforcement | Hitoshi Noguchi, Meguru Kashida, Yoshihiro Kubota | 1993-03-30 |
| 5139633 | Film-forming on substrate by sputtering | Meguru Kashida, Hitoshi Noguchi | 1992-08-18 |
| 5098515 | Method for the preparation of a silicon carbide-silicon nitride composite membrane for X-ray lithography | Meguru Kashida, Yoshihiro Kubota | 1992-03-24 |
| 5089085 | Silicon carbide membrane for X-ray lithography and method for the prepartion thereof | Meguru Kashida, Yoshihiro Kubota | 1992-02-18 |
| 5070733 | Photoacoustic imaging method | Toshio Koda | 1991-12-10 |