Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5566043 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Takaaki Nagao, Kazuhiko Urano, Junichi Arami, Kenji Ishikawa | 1996-10-15 |
| 5532063 | Silicon oxide depositing source and coated film | Takeshi Kakegawa, Kazuhiko Urano, Toshimasa Okamura, Tetsuo Suzuki, Masatoshi Sato | 1996-07-02 |