Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940512 | Electrostatic chuck | Akio Nakano, Ikuo Sakurai | 2011-05-10 |
| 7667943 | Electrostatic chuck | Akio Nakano, Ikuo Sakurai | 2010-02-23 |
| 7352555 | Electrostatic chuck | Akio Nakano | 2008-04-01 |
| 6896824 | Heat-softening heat-radiation sheet | Kazuhiko Tomaru, Tsutomu Yoneyama | 2005-05-24 |
| 6760214 | Electrostatic chuck for ion injector | Kazuhiko Tomaru, Tsutomu Yoneyama | 2004-07-06 |
| 6563195 | Wafer support having a dustproof covering film | Kazuhiko Tomaru, Tsutomu Yoneyama | 2003-05-13 |
| 6545267 | Wafer holder of ion implantation apparatus | Ryuichi Miura, Kazuhiko Tomaru, Tsutomu Yoneyama | 2003-04-08 |
| 6071630 | Electrostatic chuck | Kazuhiko Tomaru, Tsutomu Yoneyama | 2000-06-06 |
| 5147691 | Method of producing cover-packing assembly for hard disk device | Noboru Shimamoto, Tooru Takamura | 1992-09-15 |