Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10584035 | Purification system of trichlorosilane and silicon crystal | Masahiko Ishida, Shigeyoshi Netsu | 2020-03-10 |
| 10207932 | Trichlorosilane purification system and method for producing polycrystalline silicon | Masahiko Ishida, Shigeyoshi Netsu | 2019-02-19 |