Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10590958 | Vacuum pump | — | 2020-03-17 |
| 10415577 | Deposition substance monitoring device and vacuum pump | — | 2019-09-17 |
| 10267337 | Vacuum pump and method of manufacturing vacuum pump | — | 2019-04-23 |
| 10221863 | Vacuum pump | — | 2019-03-05 |
| 10161404 | Turbo-molecular pump | Shingo Tsutsui | 2018-12-25 |
| 10132329 | Vacuum pump | — | 2018-11-20 |
| 9822783 | Vacuum pump | — | 2017-11-21 |
| 9771940 | Vacuum pump | — | 2017-09-26 |