Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6305315 | ECR plasma apparatus | Masayasu Suzuki | 2001-10-23 |
| 6268582 | ECR plasma CVD apparatus | Noritaka Akita | 2001-07-31 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6305315 | ECR plasma apparatus | Masayasu Suzuki | 2001-10-23 |
| 6268582 | ECR plasma CVD apparatus | Noritaka Akita | 2001-07-31 |