Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158155 | Estimation device, vacuum valve, and vacuum pump | — | 2024-12-03 |
| 11809205 | Estimator and vacuum valve | — | 2023-11-07 |
| 11551952 | Vacuum valve, method of controlling vacuum valve, and estimation device | — | 2023-01-10 |
| 11378073 | Estimation device and valve control device | — | 2022-07-05 |
| 11054847 | Valve control apparatus and vacuum valve | — | 2021-07-06 |
| 11035488 | Vacuum valve and valve control device | — | 2021-06-15 |
| 11015609 | Magnetic levitation control device and vacuum pump | — | 2021-05-25 |
| 10968949 | Magnetic bearing control device and vacuum pump | — | 2021-04-06 |
| 10753363 | Monitoring device and vacuum pump | — | 2020-08-25 |
| 10711909 | Target opening degree estimator and pressure adjustment vacuum valve | — | 2020-07-14 |
| 10683867 | Vacuum valve, vacuum pump, and vacuum pumping system | Masaya Nakamura, Atsuo Nakatani, Nobuyuki Hirata | 2020-06-16 |
| 10683893 | Magnetic bearing device and vacuum pump | — | 2020-06-16 |
| 10634147 | Magnetic levitation vacuum pump | — | 2020-04-28 |
| 10619669 | Magnetic bearing control device and vacuum pump | — | 2020-04-14 |
| 10599166 | Valve control device | Nobuyuki Hirata, Atsuo Nakatani, Masaya Nakamura | 2020-03-24 |
| 10496112 | Valve device | — | 2019-12-03 |
| 10487875 | Magnetic bearing device | — | 2019-11-26 |
| 10474143 | Rotor life estimation device and vacuum pump | — | 2019-11-12 |
| 10443600 | Gas estimation device and vacuum pumping device | Masaya Nakamura | 2019-10-15 |
| 10408262 | Magnet bearing device and rotor rotary-drive apparatus | — | 2019-09-10 |
| 10400775 | Vacuum valve and vacuum pump | Masaya Nakamura, Atsuo Nakatani, Nobuyuki Hirata | 2019-09-03 |
| 10344770 | Temperature control device and turbo-molecular pump | — | 2019-07-09 |
| 10260559 | Motor driving device and vacuum pump | — | 2019-04-16 |
| 10001130 | Vacuum pump | — | 2018-06-19 |
| 9816514 | Magnetic bearing device and vacuum pump | — | 2017-11-14 |