Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337003 | Vacuum apparatus and driving mechanism therefor | Jiro Ikeda, Yoshifumi Oda | 2002-01-08 |
| 6083364 | Magnetron sputtering apparatus for single substrate processing | Jiro Ikeda | 2000-07-04 |
| 5336029 | Loading apparatus having a suction-hold mechanism | Naoki Kato, Eiji Konoshima, Jiro Ikeda | 1994-08-09 |
| 5254236 | Sputtering apparatus | Jiro Ikeda | 1993-10-19 |
| 5205918 | Apparatus having a vacuum chamber | Hisashi Ubukata | 1993-04-27 |