Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383899 | Method of forming polycrystalline semiconductor film from amorphous deposit by modulating crystallization with a combination of pre-annealing and ion implantation | — | 2002-05-07 |
| 6329270 | Laser annealed microcrystalline film and method for same | — | 2001-12-11 |
| 6169013 | Method of optimizing crystal grain size in polycrystalline silicon films | — | 2001-01-02 |
| 6071796 | Method of controlling oxygen incorporation during crystallization of silicon film by excimer laser anneal in air ambient | — | 2000-06-06 |
| 5959314 | Polycrystalline silicon from the crystallization of microcrystalline silicon | — | 1999-09-28 |
| 5827773 | Method for forming polycrystalline silicon from the crystallization of microcrystalline silicon | — | 1998-10-27 |