Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830993 | Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method | James S. Im, Robert S. Sposili | 2004-12-14 |
| 6792029 | Method of suppressing energy spikes of a partially-coherent beam | Apostolos T. Voutsas, Yasuhiro Mitiani | 2004-09-14 |
| 6777276 | System and method for optimized laser annealing smoothing mask | Yasuhiro Mitani, Apostolos T. Voutsas | 2004-08-17 |
| 6767804 | 2N mask design and method of sequential lateral solidification | — | 2004-07-27 |
| 6733931 | Symmetrical mask system and method for laser irradiation | Apostolos T. Voutsas, Yasuhiro Mitiani | 2004-05-11 |
| 6709910 | Method for reducing surface protrusions in the fabrication of lilac films | Apostolos T. Voutsas, Masahiro Adachi | 2004-03-23 |
| 6660576 | Substrate and method for producing variable quality substrate material | Apostolos T. Voutsas, Yasuhiro Mitiani | 2003-12-09 |
| 6635554 | Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures | James S. Im, Robert S. Sposili | 2003-10-21 |
| 6573531 | Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures | James S. Im, Robert S. Sposili | 2003-06-03 |
| 6555449 | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication | James S. Im, Robert S. Sposili | 2003-04-29 |