Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8357267 | Film producing method using atmospheric pressure hydrogen plasma, and method and apparatus for producing refined film | Hiromasa Ohmi, Hiroaki Kakiuchi | 2013-01-22 |
| 6355569 | Dry etching method and apparatus | Masao Shimizu, Kumayasu Yoshii | 2002-03-12 |