Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808645 | Susceptor and surface processing method | Tetsuya Nakabayashi, Kazuyuki Zaitsu, Masafumi Kokura | 2004-10-26 |
| 6133157 | Dry etching method of a silicon thin film | Takehisa Sakurai, Katsuhiro Kawai, Atsushi Ban, Masaru Kajitani, Mikio Katayama | 2000-10-17 |
| 5783494 | Selective dry etching method of undoped and doped silicon thin films | Takehisa Sakurai, Katsuhiro Kawai, Atsushi Ban, Masaru Kajitani, Mikio Katayama | 1998-07-21 |
| 5162901 | Active-matrix display device with added capacitance electrode wire and secondary wire connected thereto | Yasunori Shimada, Hirohisa Tanaka, Hisashi Saito | 1992-11-10 |