Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585361 | Projection exposure apparatus and method | — | 2020-03-10 |
| 10197923 | Exposure device and out-of-focus and tilt error compensation method | Feibiao Chen, Chang Zhou, Qi Cheng, Lei Diao, Jingchao Qi | 2019-02-05 |
| 9188434 | Backside alignment apparatus and method | Bing Xu, Xiang Jia, Xiaoqing Yang | 2015-11-17 |