YC

Yanmin Cai

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #3,264,487 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8027028 Precise positioning system for dual stage switching exposure Yingsheng Li, Xiaoping Li, Zhiyong Yang, Jun Ming Guan, Shaowen Gao +2 more 2011-09-27