TS

Tongke Su

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #2,746,789 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11106005 Prism rotation adjustment mechanism, stepper exposure system, and stepper — 2021-08-31