HX

Hongfa Xia

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #2,806,918 of 4,157,543Top 70%
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Patent #TitleCo-InventorsDate
10732509 Knife edge set of mask aligner, large-view-field mask aligner, and exposure method Bin Wang, Xiaofeng Yang 2020-08-04