Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983415 | Shutter device, method of controlling same, photolithography machine, and method of controlling exposure dose thereof | Zhiyong Jiang, Yanfei Wang | 2021-04-20 |
| 10928704 | Shutter device | Yanfei Wang, Xiang Jia | 2021-02-23 |
| 10818172 | Method, device and system for processing startup of preceding vehicle | Wei Tan, Yangwen Huang, Hu Dai | 2020-10-27 |
| 10712668 | Shutter device used for exposure in lithography machine, and method for use thereof | Menglai Chen | 2020-07-14 |