BP

Bofang Peng

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #2,853,607 of 4,157,543Top 70%
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Patent #TitleCo-InventorsDate
10268125 Device and method for detecting overlay error Hailiang LU, Fan Wang 2019-04-23