Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983448 | Objective lens protection device, objective lens system and lithographic device | Xianming Jimmy Li | 2021-04-20 |
| 10539887 | Lens contamination prevention device and method | Dongchun Lang | 2020-01-21 |