Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002708 | Method for forming intermetallic air gap | Xiaoxu Kang, Ruoxi Shen | 2024-06-04 |
| 11769679 | Apparatus and method for improving film thickness uniformity | Xiaoxu Kang | 2023-09-26 |