Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276450 | Fabrication technology for metal gate | Yongyue Chen, Haifeng Zhou | 2019-04-30 |
| 10038078 | Integration process of finFET spacer formation | Hailan Yi, Yongyue Chen | 2018-07-31 |
| 9570562 | Method of planarizing polysilicon gate | Junhua Yan | 2017-02-14 |
| 9449872 | Method for forming cobalt barrier layer and metal interconnection process | Jingxun Fang | 2016-09-20 |