Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9150963 | Method for depositing phosphosilicate glass | Meimei Gu, Huijun Zhang, ChienWei Chen | 2015-10-06 |
| 8541307 | Treatment method for reducing particles in dual damascene silicon nitride process | Meimei Gu, Jun Xu, Ke Wang | 2013-09-24 |