Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8673768 | Fabrication method for improving surface planarity after tungsten chemical mechanical polishing | Jingxun Fang, Wei Zuo, Xiaogang Tong, Zhe Wang, Lei Deng +1 more | 2014-03-18 |