Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762303 | Method for improving overlay metrology accuracy of self-aligned multiple patterning | Cong Zhang | 2023-09-19 |
| 11422474 | Dynamic illumination method based on scan exposure machine | Lulu LAI, Xiaobo Guo, Cong Zhang | 2022-08-23 |