Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383331 | Device for discharging two or more media with media nozzles | — | 2002-05-07 |
| 6316367 | Process and device for handling disk-like objects, especially silicon wafers | — | 2001-11-13 |
| 6193798 | Arrangement for treatment of wafer-shaped articles, particularly silicon wafers | — | 2001-02-27 |
| 6162739 | Process for wet etching of semiconductor wafers | Gerald Wagner | 2000-12-19 |
| 6056208 | Apparatus for preventing dripping from conduit openings | Willibald Pirker | 2000-05-02 |
| 6056825 | Rotary chuck including pins for lifting wafers | — | 2000-05-02 |
| 6022417 | Support for wafer-shaped objects, in particular silicon wafers | — | 2000-02-08 |
| 5845662 | Device for treatment of wafer-shaped articles, especially silicon wafers | — | 1998-12-08 |
| 5762391 | Gripper for disk-shaped articles | — | 1998-06-09 |
| 5513668 | Support for disk-shaped articles | — | 1996-05-07 |
| 5492566 | Support for disk-shaped articles using the Bernoulli principle | — | 1996-02-20 |
| 4903717 | Support for slice-shaped articles and device for etching silicon wafers with such a support | — | 1990-02-27 |