Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7726323 | Device and process for liquid treatment of wafer-shaped articles | — | 2010-06-01 |
| 7267129 | Device and process for liquid treatment of wafer-shaped articles | — | 2007-09-11 |
| 7007702 | Device and process for liquid treatment of wafer-shaped articles | — | 2006-03-07 |
| 6858092 | Device and process for liquid treatment of wafer-shaped articles | — | 2005-02-22 |
| 6435200 | Device and process for liquid treatment of wafer-shaped articles | — | 2002-08-20 |
| 6328846 | Device for an etch treatment of a disk-like object | Philip Engesser | 2001-12-11 |