Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029538 | Single wafer type substrate cleaning method and apparatus | Yuji Ono | 2006-04-18 |
| 6807974 | Single wafer type substrate cleaning method and apparatus | Yuji Ono | 2004-10-26 |
| 6792959 | Single wafer type cleaning method and apparatus | Yuji Ono | 2004-09-21 |
| 6763839 | Substrate cleaning system | Yuji Ono, Hiroshi Yamaguchi, Miyuki Takaishi, Hideo Kamikochi | 2004-07-20 |
| 6752877 | Single wafer type cleaning method and apparatus | Yuji Ono | 2004-06-22 |
| 5423377 | Condenser for a steam turbine and a method of operating such a condenser | Kazuya Iwata, Yoosyun Horibe, Yoshio Sumiya | 1995-06-13 |