Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6868736 | Ultra-miniature optical pressure sensing system | Takeo Sawatari, Alex Klooster, Dean M. Aslam, Yuping Lin | 2005-03-22 | |
| 6597446 | Holographic scatterometer for detection and analysis of wafer surface deposits | Alex Klooster, Takeo Sawatari | 2003-07-22 | |
| 5923423 | Heterodyne scatterometer for detecting and analyzing wafer surface defects | Takeo Sawatari, Philip A. Gaubis, Alex Klooster | 1999-07-13 | |
| 5343179 | Miniaturized solenoid operated trip device | Charles W. Pipich, David W. Fugate | 1994-08-30 | $4,013,000 |