Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10183856 | Manufacturing method of micro-electro-mechanical systems device | Wei-Yang Ou | 2019-01-22 |
| 9915679 | Method of detecting whether microelectromechanical system device is hermetic | Wei-Yang Ou, Hung-Sen Chen | 2018-03-13 |
| 7597186 | Substrate transport device | Yun-Sheng Chung, Fu-Ching Tung | 2009-10-06 |