Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293354 | Apparatus and method for calibrating lithography process | Chun-Chi Chen, Wei Zhu, Chin-Yu Chen | 2016-03-22 |
| 7701549 | Method and apparatus to prevent contamination of optical element by resist processing | Chin-Yu Chen, Hsu Sheng Chang, Zheng Tang | 2010-04-20 |