KL

KUO-CHANG LIAO

S( Semiconductor Manufacturing International (Shanghai): 1 patents #561 of 1,122Top 50%
Overall (All Time): #3,219,494 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Weijun Song, Dang Quan Liao 2012-08-21