Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9410233 | Method of manufacturing semiconductor device and wafer | Xiaoying Meng, Haiyang Zhang | 2016-08-09 |
| 9064819 | Post-etch treating method | Haiyang Zhang, Minda Hu, Dongjiang Wang | 2015-06-23 |
| 8828871 | Method for forming pattern and mask pattern, and method for manufacturing semiconductor device | Xiaoying Meng, Haiyang Zhang | 2014-09-09 |
| 8753930 | Method of manufacturing semiconductor device including ashing of photoresist with deuterium or tritium gas | Xiaoying Meng, Haiyang Zhang | 2014-06-17 |
| 8445376 | Post-etching treatment process for copper interconnecting wires | Dongjiang Wang, Haiyang Zhang | 2013-05-21 |