Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943899 | Substrate-container measuring device, and substrate-container measuring jig | — | 2005-09-13 |
| 6808352 | Method for transporting boards, load port apparatus, and board transport system | — | 2004-10-26 |
| 6192603 | Vacuum processing apparatus and magnetic seal rotary bearing unit | — | 2001-02-27 |
| 5527718 | Process for removing impurities from polycide electrode and insulating film using heat | Kazuhiro Tajima | 1996-06-18 |